Journal of Aeronautical Materials
ISSN:1005-5053
Citation: | Yangyang MU, Jianyong TU, Jimei XUE, Fang YE, Laifei CHENG. Research progress on SiCN ceramic prepared at low temperature by chemical vapor deposition[J]. Journal of Aeronautical Materials, 2019, 39(3): 1-9. |
[1] | KUMAGAWA M,SUNAMI H,TERASAKI T,et al. Epitaxial growth with light irradiation[J]. Japanese Journal of Applied Physics,2014,7:1332-1341. |
[2] | NELSON L S,RICHARDSON N L. Formation of thin rods of pyrolytic carbon by heating with a focused carbon dioxide laser[J]. Material Research Bulletin,1972,7:971-976. doi: 10.1016/0025-5408(72)90087-6 |
[3] | ALLEN S D,MOORE D R,LOBKOVSKY E B,et al. High-activity, single-site catalysts for the alternating copolymerization of CO2 and propylene oxide[J]. Journal of the American Chemical Society,2002,124(48):14284-14285. doi: 10.1021/ja028071g |
[4] | 王季陶. 非平衡定态相图新概念及其应用—激活低压金刚石气相生长热力学[J]. 物理,1998(2):77-83.WANG J T. Thermodynamics of activated low pressure diamond growth from the vapor phase[J]. Physics,1998(2):77-83.) |
[5] | XIE Y P,CHENG L F,LI L J,et al. Fabrication of laminated SiCw/SiC ceramic composites by CVI[J]. Journal of the European Ceramic Society,2013,33(10):1701-1706. doi: 10.1016/j.jeurceramsoc.2013.02.019 |
[6] | 刘永胜,成来飞,张立同,等. CVI制备C/Si3N4复合材料及其表征[J]. 复合材料科学与工程,2008,15(3):207-216.LIU Y S,CHENG L F,ZHANG L T,et al. Preparation and characterization of C/Si3N4 composites by chemical vapor Infiltration[J]. Journal of Inorganic Materials,2008,15(3):207-216.) |
[7] | FAN X M,YIN X W,CHENG Y,et al. Microstructure and tribological behaviors of C/C-BN composites fabricated by chemical vapor infiltration[J]. Ceramics International,2012,38(8):6137-6144. doi: 10.1016/j.ceramint.2012.04.063 |
[8] | ZHU Y,CHENG L F,MA B S,et al. New route to synthesize ZrB2 coatings by reactive chemical vapor deposition method using Zr-BCl3-H2-Ar reagents[J]. Surface & Coatings Technology,2018,337:209-216. |
[9] | YE F,ZHANG L T,YIN X W,et al. Fabrication of Si3N4-SiBC composite ceramic and its excellent electromagnetic properties[J]. Journal of the European Ceramic Society,2012,32(16):4025-4029. doi: 10.1016/j.jeurceramsoc.2012.07.002 |
[10] | LIU X F,ZHANG L T,LIU Y S,et al. Microstructure and the dielectric properties of SiCN-Si3N4 ceramics fabricated via LPCVD/CVI[J]. Ceramics International,2014,40(3):5097-5102. doi: 10.1016/j.ceramint.2013.09.126 |
[11] | LI J P,ZHAO M X,LIU Y S,et al. Microstructure and dielectric properties of LPCVD/CVI-SiBCN ceramics annealed at different temperatures[J]. Materials,2017,10(6):655. doi: 10.3390/ma10060655 |
[12] | LI Q,YIN X W,FENG L Y. Dielectric properties of Si3N4-SiCN composite ceramics in X-band[J]. Ceramics International,2012,7(38):6015-6020. |
[13] | 潘红星. CNWs(CNTs)/Si3N4复相陶瓷的微结构与电磁性能研究[D]. 西安: 西北工业大学, 2017.PAN H X. Microstructure and electromagnetic properties of CNWs(CNTs)/Si3N4 composite ceramics[D]. Xi’an: Northwestern Polytechnical University, 2017. |
[14] | 卢国锋,乔生儒. CVI法制备的C/PyC/Si-C-N复合材料弯曲行为研究[J]. 材料导报,2015,29(24):27-30.LU G F,QIAO S R. Flexural behaviors of C/PyC/Si-C-N composite fabricated by CVI[J]. Materials Reports,2015,29(24):27-30.) |
[15] | CHENG L F,XU Y D,ZHANG L T,et al. Oxidation and defect control of CVD SiC coating on three-dimensional C/SiC composites[J]. Carbon,2002,40(12):2229-2234. doi: 10.1016/S0008-6223(02)00103-3 |
[16] | REBILLAT F,GUETTE A,ESPITALIER L,et al. Chemical and mechanical degradation of Hi-nicalon and Hi-nicalon-S fibers under CVD/CVI BN processing conditions[J]. Key Engineering Materials,1999,164/165:31-34. |
[17] | 郭德宇. 化学气相沉积法制备石墨烯研究[D]. 沈阳: 东北大学, 2014.GUO D Y. Study on preparation of graphene by chemical vapor deposition[D]. Shenyang: Northeastern University, 2014. |
[18] | 薛继梅. CVD SiCN陶瓷的生成机理及其电磁性能研究[D]. 西安: 西北工业大学, 2013.XUE J M. Study on formation mechanism and electromagnetic properties of CVD SiCN ceramics[D]. Xi’an: Northwestern Polytechnical University, 2013. |
[19] | ZHU Y,CHENG L F,MA B S,et al. Effect of CVD ZrB2 coating thickness on anti-ablation performance of C/SiC composites[J]. Ceramics International,2018,44(7):8166-8175. doi: 10.1016/j.ceramint.2018.01.264 |
[20] | ZHU Y,CHENG L F,LI M X,et al. The synthesis and characterization of CVD ZrB2 coating from ZrCl4-BCl3-H2-Ar system[J]. Ceramics International,2017,44(2):2002-2010. |
[21] | LI J P,QIN H L,LIU Y S,et al. Effect of the SiCl4 flow rate on SiBN deposition kinetics in SiCl4-BCl3-NH3-H2-Ar environment[J]. Materials,2017,10(6):627. doi: 10.3390/ma10060627 |
[22] | HAN G F,LIU Y S,ZHANG L T,et al. Fabrication and characteristic of Nextel 720 fiber-reinforced silicon nitride matrix composites by chemical vapor infiltration process[J]. International Journal of Applied Ceramic Technology,2015,12(3):529-534. doi: 10.1111/ijac.2015.12.issue-3 |
[23] | HAN S M,AYDIL E S. Study of surface reactions during plasma enhanced chemical vapor deposition of SiO2 from SiH4, O2 and Ar plasma[J]. Journal of Vacuum Science & Technology A,1996,14(4):2062-2070. |
[24] | JEDRZEJOWSKI P,CIZEK J,AMASSIAN A. Mechanical and optical properties of hard Si-C-N coatings prepared by PECVD[J]. Thin Solid Films,2004(447/448):201-207. |
[25] | YE F,SONG Q,ZHANG Z C,et al. Direct growth of edge-rich graphene with tunable dielectric properties in porous Si3N4 ceramic for broadband high-performance microwave absorption[J]. Advanced Functional Materials,2018:1707205. |
[26] | ZHAO D L,LUO F,ZHOU W C. Microstructure and effective modeling of the microwave permittivity of nano SiC(N) composite powder[J]. Advanced Materials Research,2006,11/12:141-144. doi: 10.4028/www.scientific.net/AMR.11-12 |
[27] | TING S F,FANG Y K,HSIEH W T,et al. Heteroepitaxial silicon-carbide nitride films with different carbon sources on silicon substrates prepared by rapid-thermal chemical-vapor deposition[J]. Journal of Electronic materials,2002,31(12):1341-1346. doi: 10.1007/s11664-002-0119-2 |
[28] | 梁彩云,王志江. 耐高温吸波材料的研究进展[J]. 航空材料学报,2018,38(3):1-9.LIANG C Y ,WANG Z J. Research progress of high temperature microwave absorption materials[J]. Journal of Aeronautical Materials,2018,38(3):1-9.) |
[29] | YE F,ZHANG L T,YIN X W,et al. Thermodynamic and kinetic studies on the deposition of silicon carbon nitride from CH3SiCl3-C3H6-NH3-H2-Ar and its excellent electromagnetic absorbing property[J]. Journal of Alloys and Compounds,2013,589(15):579-589. |
[30] | XUE JM,YIN X W,YE F,et al. Thermodynamic analysis on the codeposition of SiC-Si3N4 composite ceramics by chemical vapor deposition using SiCl4-NH3-CH4-H2-Ar mixture gases[J]. Journal of American Ceramic Society,2013,96:979-986. doi: 10.1111/jace.2013.96.issue-3 |
[31] | XUE J M,YIN X W,LIU X F,et al. Thermodynamic calculation for the chemical vapor deposition of silicon carbonitride[J]. Journal of the European Ceramic Society,2014,34(15):3607-3618. doi: 10.1016/j.jeurceramsoc.2014.05.023 |
[32] | IVANOV P A,CHELNOKOV V E. Recent developments in SiC single-crystal electronics[J]. Semiconductor Science and Technology,1992(7):863-880. |
[33] | 葛凯勇,王群,张晓宁,等. 碳化硅吸波性能改进的研究[J]. 功能材料与器件学报,2002,8(3):263-266. doi: 10.3969/j.issn.1007-4252.2002.03.011GE K Y,WANG Q,ZHANG X N,et al. Study on property improvement of SiC wave absorbers[J]. Journal of Functional Materials and Devices,2002,8(3):263-266.) doi: 10.3969/j.issn.1007-4252.2002.03.011 |
[34] | TAN Y F,LI L G,ZHANG S B,et al. Study on the granularity effect on electromagnetic wave absorbing properties of Ni-SiC composites[J]. International Symposium on Electromagnetic Compatibility,2008. |
[35] | 赵东林,周万城. 纳米Si/C/N复相粉体的微波吸收特性[J]. 复合材料学报,2002,2(19):65-70.ZHAO D L,ZHOU W C. Microwave absorbing property of nano Si/C/N composite powder[J]. Acta Materiae Composite Materials,2002,2(19):65-70.) |
[36] | 马晓康,殷小玮,范晓孟,等. 碳化硅陶瓷基复合材料的自愈合及结构吸波一体化研究进展[J]. 航空材料学报,2018,38(5):1-9.MA X K,YIN X W,FAN X M,et al. Progress on self-healing and structure-wave absorbing integration of silicon carbide ceramic matrix composites[J]. Journal of Aeronautical Materials,2018,38(5):1-9.) |
[37] | ZHENG G P,YIN X W,LIU S H,et al. Improved electromagnetic absorbing properties of Si3N4-SiC/SiO2 composite ceramics with multi-shell microstructure[J]. Journal of the European Ceramic Society,2013,33(11):2173-2180. doi: 10.1016/j.jeurceramsoc.2013.03.021 |
[38] | LI M,YIN X W,ZHENG G P,et al. High-temperature dielectric and microwave absorption properties of Si3N4-SiC/SiO2 composite ceramics[J]. Journal of Materials Science,2015,50(3):1478-1487. doi: 10.1007/s10853-014-8709-y |
[39] | MORKOC H,STRITE S,GAO G B,et al. Large-band-gap SiC III-V nitride and II-VI ZnSe-based semiconductor device technologies[J]. Journal of Applied Physics,1994(76):1363-1384. |
[40] | CHANG H L,KOU C T. Characteristics of Si-C-N films deposited by microwave plasma CVD on Si wafers with various buffer layer materials[J]. Diamond and Related Materials,2001(10):1910-1915. |
[41] | CHENG W,JIANG J,ZHANG Y,et al. Effect of the deposition conditions on the morphology and bonding structure of Si-C-N films[J]. Materials Chemistry and Physics,2004(85):370-376. |
[42] | HALUSCHKA C,ENGEL C,RIEDEL R. Silicon carbonitride ceramics derived from polysilazanes: part II: investigation of electrical properties[J]. Journal of the European Ceramic Society,2000,20:1365-1374. doi: 10.1016/S0955-2219(00)00009-1 |
[43] | BENDEDDOUCHE A,BERJOAN R,BECHE E,et al. Structural characterization of amorphous SiCxNy chemical vapor deposited coatings[J]. Journal of Applied Physics,1997,81(9):6147-6154. doi: 10.1063/1.364396 |
[44] | YE F,ZHANG L T,YIN X W,et al. SiCN-based composite ceramics fabricated by chemical vapor infiltration with excellent mechanical and electromagnetic properties[J]. Materials Letters,2013,111:169-172. doi: 10.1016/j.matlet.2013.08.082 |
[45] | 张磊,卓林蓉,汤桂平,等. 增材制造超材料及其隐身功能调控的研究进展[J]. 航空材料学报,2018,38(3):10-19.ZHANG L,ZHUO L R,TANG G P,et al. Additive manufacture of metamaterials: a review[J]. Journal of Aeronautical Materials,2018,38(3):10-19.) |
[46] | LIU X F,ZHANG L T,LIU Y S,et al. Thermodynamic calculations on the chemical vapor deposition of Si-C-N from the SiCl4-NH3-C3H6-H2-Ar system[J]. Ceramics International,2013,39(4):3971-3977. |
[47] | XUE J M, YIN X W, YE F, et al. Thermodynamic analysis on the codeposition of SiC-Si3N4 composite ceramics by chemical vapor deposition using SiCl4-NH3-CH4-H2-Ar mixture gases[J]. Journal of the American Ceramic Society, 2013, 96(3): 979-986. |
[48] | XUE J M,YIN X W,PAN H X,et al. Crystallization mechanism of CVD Si3N4-SiCN composite ceramics annealed in N2 atmosphere and its excellent EMW absorption properties[J]. Journal of the American Ceramic Society,2016,99(8):2672-2679. doi: 10.1016/j.ceramint.2012.10.245 |