Research Progress in Preparation and Crystallization Technologies of Amorphous ITO Film

Jiaming LI; Liangbao JIANG; Mu CHEN; Xiaoyu LI; Youxiu WEI; Xiaofeng ZHANG; Yibo MA; Yue YAN

doi:10.11868/j.issn.1005-5053.2018.000035

Volume 38 Issue 5

Oct. 2018

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Article Navigation > Journal of Aeronautical Materials > 2018 > 38(5): 24-35

Jiaming LI, Liangbao JIANG, Mu CHEN, Xiaoyu LI, Youxiu WEI, Xiaofeng ZHANG, Yibo MA, Yue YAN. Research Progress in Preparation and Crystallization Technologies of Amorphous ITO Film[J]. Journal of Aeronautical Materials, 2018, 38(5): 24-35. doi: 10.11868/j.issn.1005-5053.2018.000035

Citation:

Jiaming LI, Liangbao JIANG, Mu CHEN, Xiaoyu LI, Youxiu WEI, Xiaofeng ZHANG, Yibo MA, Yue YAN. Research Progress in Preparation and Crystallization Technologies of Amorphous ITO Film[J]. Journal of Aeronautical Materials, 2018, 38(5): 24-35.

Citation:

Jiaming LI, Liangbao JIANG, Mu CHEN, Xiaoyu LI, Youxiu WEI, Xiaofeng ZHANG, Yibo MA, Yue YAN. Research Progress in Preparation and Crystallization Technologies of Amorphous ITO Film[J]. Journal of Aeronautical Materials, 2018, 38(5): 24-35.

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Research Progress in Preparation and Crystallization Technologies of Amorphous ITO Film

doi: 10.11868/j.issn.1005-5053.2018.000035

Jiaming LI^1,2,
Liangbao JIANG^1,2,
Mu CHEN^1,2,
Xiaoyu LI^1,2,
Youxiu WEI^1,2,
Xiaofeng ZHANG^1,2,
Yibo MA^1,2,
Yue YAN^{1,2
,
,}

1.
AECC Beijing Institute of Aeronautical Materials，Beijing 100095, China
2.
Beijing Engineering Research Center of Advanced Structural Transparencies for the Modern Traffic System，Beijing 100095, China

Received Date: 2018-04-03
Rev Recd Date: 2018-05-14

Available Online: 2018-05-15

Publish Date: 2018-06-01

Abstract

Abstract

Transparent conductive oxide films have been widely used in liquid crystal displays, solar cells, electrochromic windows, gas sensors, curtain wall glass, heat-transfer glass for aircraft and high-speed trains (de-icing and defogging). The study of its preparation and treatment methods is also crucial and important. In order to prepare a highly transmissive and highly conductive ITO film, it is generally obtained by two methods: a crystalline high-quality thin film is deposited by a high-temperature preparation method directly, and an amorphous film is deposited at room temperature and then heat-treated. However, for substrates that are not resistant to high temperatures, they cannot be exposed to high temperatures for long periods of time. Therefore, it is significant to study the rapid heat treatment crystallization method, aiming at not only ensuring the application requirements of the ITO film, but also reducing the adverse effect of the crystallization method on the substrate. According to different application backgrounds and application requirements, selecting the appropriate preparation method and crystallization method are the key issues to obtaining highly transmissive and highly conductive films. This paper summarizes the current research progress of crystallization methods of ITO transparent conductive oxide films both at home and abroad. By comparing the mechanism, advantages and disadvantages of different thin film crystallization methods, it is found that the infrared annealing, laser annealing, and flash lamp annealing can achieve rapid crystallization of the thin film, and the temperature of substrate is lower than the temperature of film during the process. These methods are expected to replace the conventional furnace annealing crystallization method used in current commercial production for improving production efficiency, saving production costs, obtaining high-quality and high-performance transparent conductive oxide film. These methods are expected to be more widely used.
- ITO,
- transparent conductive oxide,
- thin film preparation,
- heat treatment,
- crystallization

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References(53)

References

[1]	KIM J, LEE D, SONG S, et al. Surface chemistry modification in ITO films induced by Sn²⁺ ionic state variation[J]. Current Applied Physics, 2017, 17(11): 1415-1421 doi: 10.1016/j.cap.2017.08.005
[2]	ZHANG D, TAVAKOLIYARAKI A, WU Y, et al. Influence of ITO deposition and post annealing on HIT solar cell structures[J]. Energy Procedia, 2011, 8(4): 207-213
[3]	韦友秀, 陈牧, 刘伟明, 等. 电致变色技术研究进展和应用[J]. 航空材料学报, 2016, 36(3): 108-123 WEI Y X, CHEN M, LIU W M, et al. Recent process and application of electrochromism[J]. Journal of Aeronautical Materials, 2016, 36(3): 108-123.)
[4]	张正勇, 张耀华. ITO薄膜的气敏特性[J]. 传感技术学报, 1999(1): 52-56 ZHANG Z Y, ZHANG Y H. Gas sensitive characteristic of ITO film[J]. Journal of Sensing Technology, 1999(1): 52-56.)
[5]	干蜀毅, 赵腾, 陈大鹏, 等. 汽车前挡风玻璃隔热膜的研究进展[J]. 汽车安全与节能学报, 2013, 4(1): 48-53 GAN S Y, ZHAO T, CHEN D P, et al. Review on the research of vehicle windshield heat insulation film[J]. Journal of Automotive Safety and Energy, 2013, 4(1): 48-53.)
[6]	姜辛. 透明导电氧化物薄膜[M]. 高等教育出版社, 2008. JIANG X. Transparent conductive oxide film [M]. Higher Education Press, 2008.
[7]	王光伟, 张建民, 郑宏兴, 等. ZnO薄膜的制备方法、性质和应用[J]. 真空, 2008, 45(5): 54-61 doi: 10.3969/j.issn.1002-8935.2008.05.016 WANG G W, ZHANG J M, ZHENG H X, et al. ZnO thin films: preparation, basic performance and applications[J]. Vacuum, 2008, 45(5): 54-61.) doi: 10.3969/j.issn.1002-8935.2008.05.016
[8]	BHOPAL M F, LEE D W, REHAMN A U, et al. Influence of annealing temperature on structural properties of ITO thin-films on graphite substrate[J]. Vacuum, 2016, 133: 108-113 doi: 10.1016/j.vacuum.2016.09.001
[9]	LEE C J, LIN H K, LI C H, et al. A study on electric properties for pulse laser annealing of ITO film after wet etching[J]. Thin Solid Films, 2012, 522(522): 330-335
[10]	王树林. ITO薄膜的制备及性能研究[D]. 武汉: 武汉理工大学, 2004. WANG S L. Preparation and properties of ITO films [D]. Wuhan: Wuhan University of Technology, 2004.
[11]	KURDESAU F, KHRIPUNOV G, CUNHA A F D, et al. Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature[J]. Journal of Non-Crystalline Solids, 2006, 352(9/20): 1466-1470
[12]	BETZ U, OLSSON M K, MARTHY J, et al. Thin films engineering of indium tin oxide: large area flat panel displays application[J]. Surface & Coatings Technology, 2006, 200(20): 5751-5759
[13]	GIUSTI G, TIAN L, JONES I P, et al. Microstructure-Property relationships in thin film ITO[J]. Thin Solid Films, 2009, 518(4): 1140-1144 doi: 10.1016/j.tsf.2009.05.056
[14]	ELHALAWATY S, SIVARAMAKRISHNAN K, THEODORE N D, et al The effect of sputtering pressure on electrical, optical and structure properties of indium tin oxide on glass[J]. Thin Solid Films, 2010, 518(12): 3326-3331 doi: 10.1016/j.tsf.2009.10.014
[15]	YEADON A D, WAKEHAM S J, BROWN H L, et al. Remote plasma sputtering of indium tin oxide thin films for large area flexible electronics[J]. Thin Solid Films, 2011, 520(4): 1207-1211 doi: 10.1016/j.tsf.2011.07.072
[16]	CHOI S K, LEE J I. Effect of film density on electrical properties of indium tin oxide films deposited by dc magnetron reactive sputtering[J]. Journal of Vacuum Science & Technology A Vacuum Surfaces & Films, 2001, 19(5): 2043-2047
[17]	GUILLENC, HERRERO J. Influence of oxygen in the deposition and annealing atmosphere on the characteristics of ITO thin films prepared by sputtering at room temperature[J]. Vacuum, 2006, 80(6): 615-620 doi: 10.1016/j.vacuum.2005.10.006
[18]	MANAVIZADEH N, BOROUMAND F A, ASL-SOLEIMAN E, et al. Influence of substrates on the structural and morphological properties of RF sputtered ITO thin films for photovoltaic application[J]. Thin Solid Films, 2009, 517(7): 2324-2327 doi: 10.1016/j.tsf.2008.11.027
[19]	SARHADDI R, SHAHTAHMASEBI N, ROKN-ABADI M R, et al. Effect of post-annealing temperature on nano-structure and energy band gap of indium tin oxide(ITO)nano-particles synthesized by polymerizing-complexing sol-gel method[J]. Physica E: Low-dimensional Systems and Nanostructures, 2010, 43(1): 452-457 doi: 10.1016/j.physe.2010.08.028
[20]	邱阳, 陈玉峰, 祖成奎, 等. ITO薄膜的研究进展[J]. 现代技术陶瓷, 2016, 37(5): 303-324 QIU Y, CHEN Y F, ZU C K, et al. Research progress of ITO thin films[J]. Advanced Ceramics, 2016, 37(5): 303-324.)
[21]	MESHRAM N, LOKA C, PARK K R, et al. Enhanced transmittance of ITO/Ag(Cr)/ITO (IAI)multi-layered thin films by high temperature annealing[J]. Materials Letters, 2015, 145: 120-124 doi: 10.1016/j.matlet.2015.01.101
[22]	裴志亮, 孙超, 关德慧, 等. ZnO: Al(ZAO)薄膜的特性研究[J]. 自然科学进展, 2001, 11(4): 58-63 PEI Z L, SUN C, GUAN D H, et al. Characterization of ZnO: Al(ZAO)thin films[J]. Advances in Natural Science, 2001, 11(4): 58-63.)
[23]	PILLAY V V, GOYAL S. Influence of sputtering power, annealing on the structural properties of ITO Films, for application in ethanol gas sensor[J]. Materials Today Proceedings, 2015, 2(9): 4609-4619 doi: 10.1016/j.matpr.2015.10.081
[24]	JOHN K A, PHILIP R R, SAJAN P, et al. In situ, crystallization of highly conducting and transparent ITO thin films deposited by RF magnetron sputtering[J]. Vacuum, 2016, 132: 91-94 doi: 10.1016/j.vacuum.2016.07.035
[25]	BANERJEE S, MANDAL S, BARUA A K, et al. Hierarchical indium tin oxide(ITO)nano-whiskers: electron beam deposition and sub-bandgap defect levels mediated visible light driven enhanced photocatalytic activity[J]. Catalysis Communications, 2016, 87: 86-89 doi: 10.1016/j.catcom.2016.09.001
[26]	FALLAH H R, VARNAMKHASTI M G, VAHID M J. Substrate temperature effect on transparent heat reflecting nanocrystalline ITO films prepared by electron beam evaporation[J]. Renewable Energy, 2010, 35(7): 1527-1530 doi: 10.1016/j.renene.2009.10.034
[27]	KIM J H, JEON K A, KIM G H, et al. Electrical, structural, and optical properties of ITO thin films prepared at room temperature by pulsed laser deposition[J]. Applied Surface Science, 2006, 252(13): 4834-4837 doi: 10.1016/j.apsusc.2005.07.134
[28]	FENG D, SHI C, LIU Z. Introduction to materials science-an integrated approach[J]. China Particuology, 2003, 1(4): 183-183
[29]	HWANG D K, MISRA M, LEE Y E, et al. The role of Ar plasma treatment in generating oxygen vacancies in indium tin oxide thin films prepared by the sol-gel process[J]. Applied Surface Science, 2017, 405: 344-349 doi: 10.1016/j.apsusc.2017.02.007
[30]	AOUAJ M A, DIAZ R, BELAYACHI A, et al. Comparative study of ITO and FTO thin films grown by spray pyrolysis[J]. Materials Research Bulletin, 2009, 44(7): 1458-1461 doi: 10.1016/j.materresbull.2009.02.019
[31]	周嘉林, 李兆辉, 藤川昇, 等. 一种低温结晶ITO透明导电薄膜及其制备方法: CN 102651251 A[P]. 2012-08-29. ZHOU J L, LI Z H, FUJIKAWA R, et al. A low temperature crystalline ITO transparent conductive film and its preparation method. CN 102651251 A [P]. 2012-08-29.
[32]	PARK J H, BUURMA C, SIVANANTHAN S, et al. The effect of post-annealing on indium tin oxide thin films by magnetron sputtering method[J]. Applied Surface Science, 2014, 307(18): 388-392
[33]	RAOUFI D, KIASATPOUR A, FALLAH H R, et al. Surface characterization and microstructure of ITO thin films at different annealing temperatures[J]. Applied Surface Science, 2007, 253(23): 9085-9090 doi: 10.1016/j.apsusc.2007.05.032
[34]	SUN K, ZHOU W, TANG X, et al. Effects of air annealing on the structure, resistivity, infrared emissivity and transmission of indium tin oxide films[J]. Surface & Coatings Technology, 2012, 206(19/20): 4095-4098
[35]	KOSEOGLU H, TURKOGLU F, KURT M, et al. Improvement of optical and electrical properties of ITO thin films by electro-annealing[J]. Vacuum, 2015, 120(24): 8-13
[36]	LEE D H, SHIM S H, CHOI J S, et al. The effect of electro-annealing on the electrical properties of ITO film on colorless polyimide substrate[J]. Applied Surface Science, 2008, 254(15): 4650-654 doi: 10.1016/j.apsusc.2008.01.078
[37]	SHIN H I, KIM K H, KIM T W, et al. Fiber laser annealing of brush-painted ITO nanoparticles for use as transparent anode for organic solar cells[J]. Ceramics International, 2016, 42(12): 13983-13989 doi: 10.1016/j.ceramint.2016.06.001
[38]	CHEN M F, LIN K M, HO Y S. Laser annealing process of ITO thin films using beam shaping technology[J]. Optics & Lasers in Engineering, 2012, 50(3): 491-495
[39]	CHENG C W, LIN C Y. High precision patterning of ITO using femtosecond laser annealing process[J]. Applied Surface Science, 2014, 314(314): 215-220
[40]	SHINODA K, NAKAJIMA T, TSUCHIYA T. In situ, monitoring of excimer laser annealing of tin-doped indium oxide films for the development of a low-temperature fabrication process[J]. Applied Surface Science, 2014, 292(4): 1052-1058
[41]	PARK S. Xe-arc flash annealing of indium tin oxide thin-films prepared on glass backplanes[J]. International Journal of Heat & Mass Transfer, 2015, 91(9): 543-551
[42]	KIM Y, PARK S, KIM S, et al. Flash lamp annealing of indium tin oxide thin-films deposited on polyimide backplanes[J]. Thin Solid Films, 2017, 628: 88-95 doi: 10.1016/j.tsf.2017.03.016
[43]	HEGDE G, MEHDI Q Z, Al-DABBAGH J, et al. Enhancement of surface properties using new annealing technique for ITO thin films[J]. Surface Engineering, 2014, 31(7): 502-506
[44]	QASIM M, Al-DABBAGH J, MAHMOUD AHMED N, et al. Oil thermal annealed nano-structured indium tin oxide thin films for display applications[J]. Journal of the Society for Information Display, 2015, 22(4): 187-190
[45]	WAKAGI M, CHAHARA K I, ONISAWA K I, et al. Rapid heat treatment for spin coated ITO films by electron plasma annealing method[J]. Thin Solid Films, 2002, 411(1): 46-49 doi: 10.1016/S0040-6090(02)00172-4
[46]	肖曼. 板型红外线辐射加热装置探讨[J]. 科教导刊, 2012(27): 167-167 doi: 10.3969/j.issn.1674-6813.2012.27.103 SHAO M. Discussion on the plate type infrared radiation heating apparatus[J]. Academic Journal, 2012(27): 167-167.) doi: 10.3969/j.issn.1674-6813.2012.27.103
[47]	JIANG L B,WANG Y,MOHAGHEGHIAN I,et al. Effect of residual stress on the fracture of chemically strengthened thin aluminosilicate glass[J]. Journal of Materials Science, 2017, 52(3): 1405-1415 doi: 10.1007/s10853-016-0434-2
[48]	LI X Y,JIANG L B,WANG Y,et al. Correlation between K⁺-Na⁺ diffusion coefficient and flexural strength of chemically tempered aluminosilicate glass[J]. Journal of Non-Crystalline Solids, 2017, 471: 72-81 doi: 10.1016/j.jnoncrysol.2017.05.011
[49]	SONG S, YANG T, LIU J, et al. Rapid thermal annealing of ITO films[J]. Applied Surface Science, 2011, 257: 7061-7064 doi: 10.1016/j.apsusc.2011.03.009
[50]	ZHANG S, WANG T, LIN S, et al. Effect of different thermos-treatment at relatively low temperatures on the properties of indium-tin-oxide thin films[J]. Thin Solid Films, 2017, 636: 702-709 doi: 10.1016/j.tsf.2017.07.022
[51]	PRUCNAL S, REBOHLE L, SKORUPA W. Doping by flash lamp annealing[J]. Materials Science in Semiconductor Processing, 2016, 62: 115-127
[52]	刘宏燕, 颜悦, 望咏林, 等. 透明导电氧化物薄膜材料研究进展[J]. 航空材料学报, 2015, 35(4): 63-82 LIU H Y, YAN Y, WANG Y L, et al. Recent progress in study of transparent conducting oxide films[J]. Journalof Aeronautical Materials, 2015, 35(4): 63-82.)
[53]	张晓锋, 颜悦, 陈牧, 等. 非晶透明导电氧化物薄膜研究进展[J]. 航空材料学报, 2018, 38(1): 1-16 ZHANG X F, YAN Y, CHEN M, et al. Progress in amorphous transparent conducting oxide thin films[J]. Journalof Aeronautical Materials, 2018, 38(1): 1-16.)

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Research Progress in Preparation and Crystallization Technologies of Amorphous ITO Film

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