[1] |
NASLAIN R. Design,preparation and properties of non-oxide CMCs for application in engines and nuclear reactors: an overview[J]. Composites Science & Technology,2004,64(2):155-170.
|
[2] |
NASIRI N A,PATRA N,NI N,et al. Oxidation behaviour of SiC/SiC ceramic matrix composites in air[J]. Journal of the European Ceramic Society,2016,36(14):3293-3302. doi: 10.1016/j.jeurceramsoc.2016.05.051
|
[3] |
刘虎,杨金华,周怡然,等. 国外航空发动机用SiCf/SiC复合材料的材料级性能测试研究进展[J]. 材料工程,2018,46(11):1-12. doi: 10.11868/j.issn.1001-4381.2018.000503LIU H,YANG J H,ZHOU Y R,et al. Progress in coupon tests of SiCf/SiC ceramic matrix composites used for aero engines[J]. Journal of materials engineering,2018,46(11):1-12.) doi: 10.11868/j.issn.1001-4381.2018.000503
|
[4] |
STAEHLER J M,ZAWADA L P. Performance of four ceramic-matrix composite divergent flap inserts following ground testing on an F110 turbofan engine[J]. Journal of the American Ceramic Society,2010,83(7):1727-1738.
|
[5] |
周怡然,刘虎,杨金华,等. 熔融渗透工艺制备SiC-TiSi2复相陶瓷的反应机理[J]. 材料工程,2019,47(6):88-93. doi: 10.11868/j.issn.1001-4381.2018.001449ZHOU Y R,LIU H,YANG J H,et al. Reaction mechanism of SiC-TiSi2 by melt infiltration method[J]. Journal of Materials Engineering,2019,47(6):88-93.) doi: 10.11868/j.issn.1001-4381.2018.001449
|
[6] |
CHARLES H,HENAGER J,KURTZ R J. Low-activation joining of SiC/SiC composites for fusion applications[J]. Journal of Nuclear Materials,2011,417(1/2/3):375-378. doi: 10.1016/j.jnucmat.2010.12.084
|
[7] |
HINO T,HAYASHISHITA E,YAMAUCHI Y,et al. Helium gas permeability of SiC/SiC composite used for in-vessel components of nuclear fusion reactor[J]. Fusion Engineering and Design,2005,73(1):51-56. doi: 10.1016/j.fusengdes.2005.01.002
|
[8] |
SPITSBERG I,STEIBEL J. Thermal and environmental barrier coatings for SiC/SiC CMCs in aircraft engine applications[J]. Applied Ceramic Technology,2010,1(1):291-301.
|
[9] |
杨金华,吕晓旭,焦健. 碳化硅陶瓷基复合材料界面层技术研究进展[J]. 航空制造技术,2008,61(11):79-87. doi: 10.3969/j.issn.1671-833X.2008.11.016YANG J H,LV X X,JIAO J. Progress in interphase technology of silicon carbide matrix composites[J]. Aeronautical Manufacturing Technology,2008,61(11):79-87.) doi: 10.3969/j.issn.1671-833X.2008.11.016
|
[10] |
SHANTI V N, KARL J. High temperature mechanical behavior of ceramic composites[M]. Massachusetts, Butterworth-Heinemann, 1995: 6-7.
|
[11] |
NASLAIN R R. The design of the fibre-matrix interfacial zone in ceramic matrix composites[J]. Composites:Part A,1998,29(9/10):1145.
|
[12] |
SREEJITH K,VIPIN V,SUBRAMANIA S,et al. A comparative study on Cf/PyC/SiC minicomposites prepared via CVI process for hypersonic engine application[J]. International Journal of Applied Ceramic Technology,2018,15(5):1110-1123. doi: 10.1111/ijac.12898
|
[13] |
WINDISCH C F,HENAGER C,SPRINGER G D,et a1. Oxidation of the carbon interface in Nicalon fiber reinforced silicon carbide composite[J]. Journal of the American Ceramic Society,1997,80(3):569-574. doi: 10.1111/j.1151-2916.1997.tb02868.x
|
[14] |
OPILA E J,VERRILLI M J. Borosilicate glass-induced fiber degradation of SiC/BN/SiC composites exposed in combustion environments[J]. International Journal of Applied Ceramic Technology,2016,13(3):434-442. doi: 10.1111/ijac.12499
|
[15] |
NASLAIN R R,PAILLER R J F,LAMON J L. Single and multilayered interphases in SiC/SiC composites exposed to severe environmental conditions:an overview[J]. International Journal of Applied Ceramic Technology,2010,7(3):263-275.
|
[16] |
WING B L,HALLORAN J W. Subsurface oxidation of boron nitride coatings on silicon carbide fibers in SiC/SiC ceramic matrix composites[J]. Ceramics International,2018,44(14):17499-17505. doi: 10.1016/j.ceramint.2018.06.221
|
[17] |
李琳琳,李爱军,彭雨晴,等. 化学气相沉积法制备氮化硼界面涂层的研究进展[J]. 宇航材料工艺,2016,46(4):8-12. doi: 10.3969/j.issn.1007-2330.2016.04.002LI L L,LI A J,PENG Y Q,et al. Progress on boron nitride interface coating achieved by CVD[J]. Aerospace Materials Technology,2016,46(4):8-12.) doi: 10.3969/j.issn.1007-2330.2016.04.002
|
[18] |
OPILA E,BOYD M K. Oxidation of SiC fiber-reinforced SiC matrix composites with a BN interphase[J]. Materials Science Forum,2010,696:342-347.
|
[19] |
MU Y,ZHOU W C,WANG C,et al. Mechanical and electromagnetic shielding properties of SiCf/SiC composites fabricated by combined CVI and PIP process[J]. Ceramics International,2014,40(7):10037-10041. doi: 10.1016/j.ceramint.2014.02.103
|
[20] |
PARK J Y,KIM D J,KIM W J. Characterization of SiC ceramic tube prepared by the combined CVI and CVD process[J]. Advances in Science & Technology,2014,94:38-42.
|
[21] |
TAY R Y,LI H,TSANG S H,et al. Trimethylamine borane: a new single-source precursor for monolayer h-BN single crystals and h-BCN thin films[J]. Chemistry of Materials,2016,28(7):2180-2190. doi: 10.1021/acs.chemmater.6b00114
|
[22] |
REBILLAT F,GUETTE A,BROSSE C R. Chemical and mechanical alterations of SiC Nicalon fiber properties during the CVD/CVI process for boron nitride[J]. Acta Materialia,1999,47(5):1685-1696. doi: 10.1016/S1359-6454(99)00032-4
|
[23] |
JACQUES S,VINCENT H,VINCENT C,et al. Multilayered BN coatings processed by a continuous LPCVI treatment onto Hi-Nicalon fibers[J]. Journal of Solid State Chemistry,2001,162(2):358-363. doi: 10.1006/jssc.2001.9387
|
[24] |
HANNACHE H,QUENISSET J M,NASLAIN R,et al. Composite materials made from a porous 2D-carbon-carbon preform densified with boron nitride by chemical vapour infiltration[J]. Journal of Materials Science,1984,19(1):202-212. doi: 10.1007/BF02403127
|
[25] |
JACQUES S,LOPEZ M A,VINCENT C,et a1. Bouix SiC/SiC minicomposites with structure-graded BN interphases[J]. Journal of the European Ceramic Society,2000,20(12):1929-1938. doi: 10.1016/S0955-2219(00)00064-9
|
[26] |
DUGNE O,PROUHET S,GUETTE A,et al. On a thermodynamic approach to the chemical phenomena involved in the formation of a BN interphase by CVD/CVI from a BF3-NH3 precursor[J]. Journal of Alloys and Compounds,1992,176(2):187-213.
|
[27] |
PROUHET S,LANGLAIS F,GUETTE A,et al. On the kinetics of boron nitride CVD from BF3-NH3-Ar. Part 2:influence of the precursor composition and chemical mechanisms[J]. Chem Inform,1994,25(10).
|
[28] |
CARMINATI P,BUFFETEAU T,DAUGEY N,et a1. Low pressure chemical vapour deposition of BN: relationship between gas phase chemistry and coating microstructure[J]. Thin Solid Films,2018,664:106-114. doi: 10.1016/j.tsf.2018.08.020
|
[29] |
CHOLET V,VANDENBULCKE L. Chemical vapor infiltration of boron nitride interphase in ceramic fiber preforms: discussion of some aspects of the fundamentals of the isothermal chemical vapor infiltration process[J]. Journal of the American Ceramic Society,2010,76(11):2846-2858.
|
[30] |
HUANG J,PAN C,LI D. Investigation of the BN films prepared by low pressure chemical vapor deposition[J]. Surface & Coatings Technology,1999,122(2/3):166-175.
|
[31] |
EDWARD K N,STEVEN L S. Experimental design in the deposition of BN interface coatings on SiC fibers by chemical vapor deposition[J]. Surface & Coatings Technology,2006,201(6):2741-2748.
|
[32] |
CHOI B J. Chemical vapour deposition of hexagonal boron nitride films[J]. Materials Research Bulletin,1999,34(14/15):2215-2220.
|
[33] |
MOTOJIMA S,TAMURA Y,SUGIYAMA K. Low temperature deposition of hexagonal BN films by chemical vapour deposition[J]. Thin Solid Films,1982,88(3):269-274. doi: 10.1016/0040-6090(82)90056-6
|
[34] |
LEE W Y,LACKEY W J,AGRAWAL P K. Kinetic analysis of chemical vapor deposition of boron nitride[J]. Journal of the American Ceramic Society,1991,74(10):2642-2648. doi: 10.1111/j.1151-2916.1991.tb06813.x
|
[35] |
MICHIYUKI S,YOSHIZUMI T,YOSHIYUKI I,et a1. Properties of BN coating on SiC fiber by continuous CVD process[J]. The Journal of American Ceramic Society,2006:144.
|
[36] |
PATIBANDLA N. Chemical vapor deposition of boron nitride[J]. Journal of the Electrochemical Society,1992,139(12):3558-3565. doi: 10.1149/1.2069121
|
[37] |
王梦千,贾林涛,李爱军,等. BCl3-NH3-H2-N2前驱体化学气相沉积法制备氮化硼涂层[J]. 无机材料学报,2018,33(11):1179-1185.WANG M Q,JIA L T,LI A J,et al. Preparation of boron nitride coating from BCl3-NH3-H2-N2 precursor by chemical vapor deposition[J]. Journal of Inorganic Materials,2018,33(11):1179-1185.)
|
[38] |
PEDERSEN H,CHUBAROV M,HGBERG H,et a1. On the effect of water and oxygen in chemical vapor deposition of boron nitride[J]. Thin Solid Films,2012,520(18):5889-5893. doi: 10.1016/j.tsf.2012.05.004
|
[39] |
MENG C X,LI Y F,WU H,et al. Structural transformation of h-BN overlayers on Pt (111) in oxidative atmospheres[J]. Physical Chemistry Chemical Physics,2018,20(16):11013-11020. doi: 10.1039/C8CP00877A
|
[40] |
TAKASHI T,KOJI K,MASATAKA T,et al. Phase transformation of amorphous boron nitride under high pressure[J]. Chemistry of Materials,2003,15(14):2744-2751. doi: 10.1021/cm021763j
|
[41] |
GALLET S L,CHOLLON G,REBILLAT F,et a1. Microstructural and microtextural investigations of boron nitride deposited from BCl3-NH3-H2 gas mixtures[J]. Journal of the European Ceramic Society,2004,24(1):33-44. doi: 10.1016/S0955-2219(03)00126-2
|
[42] |
CHENG Y,YIN X W,LIU Y S,et al. BN coatings prepared by low pressure chemical vapor deposition using boron trichloride-ammonia-hydrogen-argon mixture gases[J]. Surface & Coatings Technology,2010,204(16/17):2797-2802.
|
[43] |
YANG M,ZHOU W C,LUO F,et al. Effects of BN/SiC dual-layer interphase on mechanical and dielectric properties of SiCf/SiC composites[J]. Ceramic International,2014(40):3411-3418.
|
[44] |
BERTRAND S,BOISRON O,PAILLER R,et al. (PyC-SiC)n and (BN-SiC)n nano-scale multilayered interphases by pressure pulsed-CVI[J]. Key Engineering Materials,1999,164/165:357-360.
|
[45] |
LI J P,QIN H L,LIU Y S,et al. Effect of the SiCl4 Flow Rate on SiBN deposition kinetics in SiCl4-BCl3-NH3-H2-Ar environment[J]. Materials,2017,10(6):627. doi: 10.3390/ma10060627
|
[46] |
LIU Y S,CHAI N,LI Z,et al. Effect of deposition temperature on deposition kinetics and mechanism of silicon boron nitride coating deposited from SiCl4-BCl3-NH3-H2-Ar mixture using low pressure chemical vapor deposition[J]. Surface & Coatings Technology,2015,261(3):295-303.
|
[47] |
UDAYAKUMAR A,GANESH S,RAJA M. Effect of intermediate heat treatment on mechanical properties of SiCf/SiC composites with BN interphase prepared by ICVI[J]. Journal of the European Ceramic Society,2011,31(6):1145-1153. doi: 10.1016/j.jeurceramsoc.2010.12.018
|
[48] |
NASLAIN R. The concept of layered interphases in SiC/SiC[J]. Ceramic Transactions,1995,58:23-39.
|
[49] |
YANG B,ZHOU X G,CHAI Y X. Mechanical properties of SiCf/SiC composites with PyC and the BN interface[J]. Ceramics International,2015,41(5):7185-7190. doi: 10.1016/j.ceramint.2015.02.041
|
[50] |
WANG L J,CHEN Z K,WANG B W,et al. Effect of free carbon on micro-mechanical properties of a chemically vapor deposited SiC coating[J]. Ceramics International,2018,44(14):17118-17123. doi: 10.1016/j.ceramint.2018.06.165
|
[51] |
ZHANG W G,HUTTINGER K J. CVD of SiC from methyltrichlorosilane. Part I: deposition rates[J]. Chemical Vapor Deposition,2001,7(4):167-172. doi: 10.1002/1521-3862(200107)7:4<167::AID-CVDE167>3.0.CO;2-L
|
[52] |
HUO Y L,CHEN Y F. Effect of gas flow and gas ratio on CVD SiC coating[J]. Journal of Synthetic Crystal,2009,38:255-258.
|
[53] |
MENG F T,DU S Y,ZHANG Y M. Characterization of silicon carbide films prepared by chemical vapor deposition[J]. Advanced Materia & Research,2011,177:78-81.
|
[54] |
刘荣军,张长瑞,刘晓阳,等. CVI过程中温度对SiC 涂层沉积速率及组织结构的影响[J]. 航空材料学报,2004,24(4):22-26. doi: 10.3969/j.issn.1005-5053.2004.04.006LIU R J,ZHANG C R,LIU X Y,et al. The effects of deposition temperature on the deposition rates and structures of CVD SiC coatings[J]. Journal of Aeronautical Materials,2004,24(4):22-26.) doi: 10.3969/j.issn.1005-5053.2004.04.006
|
[55] |
LONG Y,JAVED A,CHEN Z. Deposition rate, texture, and mechanical properties of SiC coatings produced by chemical vapor deposition at different temperatures[J]. International Journal of Applied Ceramic Technology,2013,10(1):11-19. doi: 10.1111/j.1744-7402.2012.02786.x
|
[56] |
XU Y,CHENG L,ZHANG L,et a1. Morphology and growth mechanism of silicon carbide chemical vapor deposited at low temperatures and normal atmosphere[J]. Journal of Materials Science,1999,34(3):551-555. doi: 10.1023/A:1004546712932
|
[57] |
BENAMI A,SANTANA G,ORTIZ A,et al. Strong white and blue photoluminescence from silicon nanocrystals in SiNx grown by remote PECVD using SiCl4/NH3[J]. Nanotechnology,2007,18(15):155704-155708. doi: 10.1088/0957-4484/18/15/155704
|
[58] |
尹立峰,王思青,张长瑞,等. 制备工艺对CVD Si3N4涂层沉积速率的影响[J]. 材料导报,2008,22(5):415-417.YIN L F, WANG S Q,ZHANG C R,et al. Effects of preparation technique on deposition rate of silicon nitride by low pressure chemical vapor deposition[J]. Materials Review,2008,22(5):415-417.)
|
[59] |
KWATERA A,SAWKA A,KWATERA D. Amorphous Si3N4 layers synthesized on cemented carbide tools using an atmospheric pressure CVD method[J]. Surface & Coatings Technology,1997,88(1):12-16.
|
[60] |
CHAI Y X,ZHANG H Y,ZHOU X G. Mechanical properties of SiCf/SiC composites with alternating PyC/BN multilayer interfaces[J]. Advances in Applied Ceramics,2017,116(7):392-399. doi: 10.1080/17436753.2017.1339517
|
[61] |
张伟刚. 化学气相沉积[M]. 北京: 科学出版社. 2007.ZHANG W G. Chemical vapor deposition[M].Beijing: Science Press, 2007.
|
[62] |
NORINAGA K,JANARDHANAN V M,DEUTSCHMANN O. Detailed chemical kinetic modeling of pyrolysis of ethylene, acetylene, and propylene at 1073-1373 K with a plug-flow reactor model[J]. International Journal of Chemical Kinetics,2008,40(4):199-208. doi: 10.1002/kin.20302
|
[63] |
PAUW D V,KALHOFER S,GERTHSEN D. Influence of the deposition parameters on the texture of pyrolytic carbon layers deposited on lanar substrates[J]. Carbon,2004,42(2):279-286. doi: 10.1016/j.carbon.2003.10.027
|
[64] |
HU Z J,ZHANG W G,HÜTTINGER K J,et al. Influence of pressure, temperature and surface area/volume ratio on the texture of pyrolytic carbon deposited from methane[J]. Carbon,2003,41(4):749-758. doi: 10.1016/S0008-6223(02)00403-7
|
[65] |
ISABELLE Z,RENE F,PAUL M M. Pyrolysis of propane for CVI of pyrocarbon part Ⅲ:experimental and modeling study of the formation of pyrocarbon[J]. Journal of Analytical and Applied Pyrolysis,2007,79(1):268-277.
|
[66] |
赵春年,成来飞,张立同,等. 丙烯化学气相沉积热解碳的动力学研究[J]. 无机材料学报,2008,23(6):1165-1170. doi: 10.3321/j.issn:1000-324X.2008.06.016ZHAO C N,CHENG L F,ZHANG L T,et al. Kinetics study in chemical vapor deposition of pyrocarbon from pyropylene[J]. Journal of Inorganic Materials,2008,23(6):1165-1170.) doi: 10.3321/j.issn:1000-324X.2008.06.016
|
[67] |
LACROIX R,FOURNET R,ZIEGLER D I. Kinetic modeling of surface reactions involved in CVI of pyrocarbon obtained by propane pyrolysis[J]. Carbon,2010,48(1):132-144. doi: 10.1016/j.carbon.2009.08.041
|